Outdoor Ozone Sensor – ES101O3-10
In semiconductor manufacturing, ozone (O₃) is widely used in advanced processes such as wafer cleaning, oxidation, and contamination control.
Accurate ozone monitoring is critical to ensure process stability, yield protection, and worker safety.
The ES101O3-10 is designed as a precision-grade ozone sensing technology that supports semiconductor environments where reliability and data integrity are essential.
Semiconductor Process Relevance
Ozone concentration that exceeds safe or process-specific thresholds can directly impact:
- Wafer surface quality
- Cleanroom environmental control
- Equipment lifespan
- Operator safety and regulatory compliance
ES101O3-10 provides continuous, real-time ozone measurements, enabling fabs to maintain optimal process windows and respond instantly to abnormal conditions.
Core Technology Capabilities
- High-Resolution Ozone Detection
Measures ozone up to 10 ppm with 0.01 ppm resolution for fine-grain process control - Stable Long-Term Performance
Engineered for low signal drift, suitable for continuous operation in semiconductor facilities - Fast Response Characteristics
Rapid detection supports early warning and automated interlock systems - Industrial Communication Interface
RS-485 Modbus RTU ensures seamless integration with PLC, SCADA, and MES platforms
System Integration & Smart Monitoring
The ES101O3-10 is designed to work as part of a connected semiconductor monitoring architecture:
- On-site integration with equipment controllers
- Centralized data logging for traceability and audits
- Optional NB-IoT gateway for remote diagnostics and cloud-based analytics
- Support for preventive maintenance and safety automation
Robust Design for Controlled Environments
Although optimized for precision monitoring, the sensor is housed in an IP54-rated enclosure with flame-retardant materials, ensuring durability and safety across cleanroom perimeters, exhaust zones, and utility areas.
Driving Reliability in Advanced Manufacturing
By combining high-accuracy ozone sensing, industrial communication standards, and scalable system integration,
the ES101O3-10 supports semiconductor manufacturers in achieving process excellence, operational safety, and data-driven control.
